New Approaches to High Mobility IGZO (> 70 cm²/Vs) Using Spatial ALD
In my earlier article about six months ago, I summarised the six main categories of technical driver of higher performance IGZO and the rationales for higher performing (oxide) semiconductor materials in displays. Higher performance IGZO can be attained by different levers, in general with different mechanisms: (i) process optimisation, (ii) TFT structures, (iii) crystallisation methods, … Read more